What is a LAM Diffuser Disc?

LAM Diffuser Disc’s are used in LAM auto etch machines.  We provide OEM quality replacement discs for your machine and cross reference the original LAM part numbers.

We manufacture all sizes of replacement discs in house using our patented foam for performance and reliability.

ERG designs and manufactures a number of standardized aluminum foam discs that are used in several semiconductor processing machines made by Branson, LAM Research, Applied Materials and others. Our diffuser discs are used in CVD and etching research machines at leading universities as well. Diffuser discs are available at duocelfoam.com and custom diffuser discs are available upon special request.